The spring probe is a particular detection device used to detect the change in the object's surface topography before and after loading. It consists of a spring head and a sample holder, the spring head can move according to the set force and stick to the surface, and the sample holder is fixed on the chuck by clamping the sample.
An advantage of the spring probe is that it can be moved with low force, allowing precise measurements and image comparisons of the specimen surface curvature without loading the specimen, even if the position of the gripper is not variable. At the same time, it has uniform detail detection and can measure almost all types of samples without being limited by size and surface topography.
In addition, the spring probe needs to be able to accurately control the collet and measurement frequency to ensure the accuracy of the measurement. In addition, since the loading state of the sample will affect the speed of the spring rebound, the probe should adjust the measurement torque according to different corresponding sample types to ensure the accuracy of the measurement results and obtain accurate surface topography information.
In addition, in order to ensure the long-term reliability of the spring probe, it is also necessary to pay attention to possible wear and aging problems, and in addition, details such as deformation should be regularly inspected and maintained
